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A non-lithographic plasma nanoassembly technology for polymeric nanodot and silicon nanopillar fabrication

2019
journal article
article
10.1007/s11705-019-1809-0
Journal
Frontiers of Chemical Science and Engineering
70
Author
Smyrnakis Athanasios

Zeniou Angelos

Awsiuk Kamil

Constantoudis Vassilios

Gogolides Evangelos
Volume
13
Number
3
Pages
475-484
ISSN
2095-0179
Keywords in English

plasma

nanoassembly

etching

nanodots

nanopillars

nanofabrication

Language
English
Journal language
English
Affiliation
Wydział Fizyki, Astronomii i Informatyki Stosowanej : Instytut Fizyki im. Mariana Smoluchowskiego
Scopus© citations
3
cris.lastimport.wos2024-04-09T18:18:39Z
dc.affiliationWydział Fizyki, Astronomii i Informatyki Stosowanej : Instytut Fizyki im. Mariana Smoluchowskiegopl
dc.contributor.authorSmyrnakis, Athanasiospl
dc.contributor.authorZeniou, Angelospl
dc.contributor.authorAwsiuk, Kamil - 103592 pl
dc.contributor.authorConstantoudis, Vassiliospl
dc.contributor.authorGogolides, Evangelospl
dc.date.accessioned2019-11-04T10:46:21Z
dc.date.available2019-11-04T10:46:21Z
dc.date.issued2019pl
dc.description.number3pl
dc.description.physical475-484pl
dc.description.volume13pl
dc.identifier.doi10.1007/s11705-019-1809-0pl
dc.identifier.issn2095-0179pl
dc.identifier.projectROD UJ / Opl
dc.identifier.urihttps://ruj.uj.edu.pl/xmlui/handle/item/86321
dc.languageengpl
dc.language.containerengpl
dc.rightsDodaję tylko opis bibliograficzny*
dc.rights.licenceBez licencji otwartego dostępu
dc.rights.uri*
dc.subject.enplasmapl
dc.subject.ennanoassemblypl
dc.subject.enetchingpl
dc.subject.ennanodotspl
dc.subject.ennanopillarspl
dc.subject.ennanofabricationpl
dc.subtypeArticlepl
dc.titleA non-lithographic plasma nanoassembly technology for polymeric nanodot and silicon nanopillar fabricationpl
dc.title.journalFrontiers of Chemical Science and Engineeringpl
dc.typeJournalArticlepl
dspace.entity.typePublication
cris.lastimport.wos
2024-04-09T18:18:39Z
dc.affiliationpl
Wydział Fizyki, Astronomii i Informatyki Stosowanej : Instytut Fizyki im. Mariana Smoluchowskiego
dc.contributor.authorpl
Smyrnakis, Athanasios
dc.contributor.authorpl
Zeniou, Angelos
dc.contributor.authorpl
Awsiuk, Kamil - 103592
dc.contributor.authorpl
Constantoudis, Vassilios
dc.contributor.authorpl
Gogolides, Evangelos
dc.date.accessioned
2019-11-04T10:46:21Z
dc.date.available
2019-11-04T10:46:21Z
dc.date.issuedpl
2019
dc.description.numberpl
3
dc.description.physicalpl
475-484
dc.description.volumepl
13
dc.identifier.doipl
10.1007/s11705-019-1809-0
dc.identifier.issnpl
2095-0179
dc.identifier.projectpl
ROD UJ / O
dc.identifier.uri
https://ruj.uj.edu.pl/xmlui/handle/item/86321
dc.languagepl
eng
dc.language.containerpl
eng
dc.rights*
Dodaję tylko opis bibliograficzny
dc.rights.licence
Bez licencji otwartego dostępu
dc.rights.uri*
dc.subject.enpl
plasma
dc.subject.enpl
nanoassembly
dc.subject.enpl
etching
dc.subject.enpl
nanodots
dc.subject.enpl
nanopillars
dc.subject.enpl
nanofabrication
dc.subtypepl
Article
dc.titlepl
A non-lithographic plasma nanoassembly technology for polymeric nanodot and silicon nanopillar fabrication
dc.title.journalpl
Frontiers of Chemical Science and Engineering
dc.typepl
JournalArticle
dspace.entity.type
Publication
Affiliations
Wydział Fizyki, Astronomii i Informatyki Stosowanej
Awsiuk, Kamil
No affiliation
Smyrnakis, Athanasios
Zeniou, Angelos
Constantoudis, Vassilios
Gogolides, Evangelos

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