Optimization of parameters of the linear TOF-SIMS spectrometer by DOE method

Bibliographic description

title:	Optimization of parameters of the linear TOF-SIMS spectrometer by DOE method
author:	Kosierb Adam , Merkwirth Christian, Pędrys Roman , Psonka-Antończyk Katarzyna
journal title:	Vacuum
title of volume:	Proceedings of the seventh International Conference on Ion Implantation and other Applications of Ions and Electrons (ION 2008),16-19 June 2008, Kazimierz Dolny, Poland
volume:	83
issue:	Supplement 1
date of publication :	2009
pages:	S137-S139
ISSN:	0042-207X
eISSN:	1879-2715
DOI:	10.1016/j.vacuum.2009.01.046
language:	English
journal language:	English
keywords in English:	TOF-SIMS, DOE, ensemble methods
conference:	8th International Conference on Ion Implantation and Other Applications of Ions and Electrons; 2008-06-16; 2008-06-19; Kazimierz Dolny; Polska; indeksowana w Web of Science; indeksowana w Scopus; ;
affiliation:	Wydział Fizyki, Astronomii i Informatyki Stosowanej : Instytut Fizyki im. Mariana Smoluchowskiego, Wydział Fizyki, Astronomii i Informatyki Stosowanej : Zakład Technologii Informatycznych
type:	journal article
subtype:	conference proceedings

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