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How material properties affect depth profiles : insight from computer modeling

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How material properties affect depth profiles : insight from computer modeling

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dc.contributor.author Paruch, Robert J. pl
dc.contributor.author Postawa, Zbigniew [SAP11011563] pl
dc.contributor.author Garrison, Barbara J. pl
dc.date.accessioned 2015-02-09T10:23:22Z
dc.date.available 2015-02-09T10:23:22Z
dc.date.issued 2014 pl
dc.identifier.issn 0142-2421 pl
dc.identifier.uri http://ruj.uj.edu.pl/xmlui/handle/item/2902
dc.language eng pl
dc.rights Dodaję tylko opis bibliograficzny *
dc.rights.uri *
dc.title How material properties affect depth profiles : insight from computer modeling pl
dc.type JournalArticle pl
dc.description.physical 253-256 pl
dc.abstract.en A previously developed steady-state statistical sputtering model (SS-SSM) is useful for interpretation of molecular dynamics (MD) simulations of repetitive bombardment. This method is applicable to computer modeling of depth profiling. In this paper, we demonstrate how the formalism provided by SS-SSM is used to identify the factors that determine the depth resolution of δ-layer depth profiling. The analysis is based on MD simulations of repetitive keV C60 bombardment of coinage metal samples. The results show that the primary dependence of the depth profiling quality is on the sample binding energy, with bigger binding energies giving better depth resolution. The effects of sample atom mass and surface opacity are also discussed. pl
dc.subject.en cluster sputtering pl
dc.subject.en depth profiling pl
dc.subject.en molecular dynamics pl
dc.subject.en sputtering model pl
dc.subject.en computer modeling pl
dc.description.volume 46 pl
dc.description.number S1 pl
dc.identifier.doi 10.1002/sia.5423 pl
dc.identifier.eissn 1096-9918 pl
dc.title.journal Surface and Interface Analysis pl
dc.language.container eng pl
dc.affiliation Wydział Fizyki, Astronomii i Informatyki Stosowanej : Instytut Fizyki im. Mariana Smoluchowskiego pl
dc.subtype Article pl
dc.rights.original bez licencji pl
.pointsMNiSW [2014 A]: 20


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