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Combined molecular dynamics and analytical model for repetitive cluster bombardment of solids
Journal
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
25
Author
Garrison Barbara J.
Paruch Robert
Postawa Zbigniew
Title of volume
Proceedings of the 11th Computer Simulation of Radiation Effects in Solids (COSIRES) Conference Santa Fe, New Mexico, USA, July 24-29, 2012
Volume
303
Pages
196-199
ISSN
0168-583X
eISSN
1872-9584
Keywords in English
sputtering
molecular dynamics
steady-state statistical sputtering model
depth profiling
secondary ion mass spectrometry
Language
English
Container language
English
Affiliation
Wydział Fizyki, Astronomii i Informatyki Stosowanej : Instytut Fizyki im. Mariana Smoluchowskiego
| cris.lastimport.wos | 2024-04-09T19:59:43Z | |
| dc.affiliation | Wydział Fizyki, Astronomii i Informatyki Stosowanej : Instytut Fizyki im. Mariana Smoluchowskiego | pl |
| dc.contributor.author | Garrison, Barbara J. | pl |
| dc.contributor.author | Paruch, Robert - 103655 | pl |
| dc.contributor.author | Postawa, Zbigniew - 100132 | pl |
| dc.date.accessioned | 2015-07-02T08:06:40Z | |
| dc.date.available | 2015-07-02T08:06:40Z | |
| dc.date.issued | 2013 | pl |
| dc.description.admin | [AB] Paruch, Robert J. | pl |
| dc.description.physical | 196-199 | pl |
| dc.description.volume | 303 | pl |
| dc.identifier.doi | 10.1016/j.nimb.2012.10.016 | pl |
| dc.identifier.eissn | 1872-9584 | pl |
| dc.identifier.issn | 0168-583X | pl |
| dc.identifier.uri | http://ruj.uj.edu.pl/xmlui/handle/item/11131 | |
| dc.language | eng | pl |
| dc.language.container | eng | pl |
| dc.rights | Dodaję tylko opis bibliograficzny | * |
| dc.rights.licence | bez licencji | |
| dc.rights.uri | * | |
| dc.subject.en | sputtering | pl |
| dc.subject.en | molecular dynamics | pl |
| dc.subject.en | steady-state statistical sputtering model | pl |
| dc.subject.en | depth profiling | pl |
| dc.subject.en | secondary ion mass spectrometry | pl |
| dc.subtype | Article | pl |
| dc.title | Combined molecular dynamics and analytical model for repetitive cluster bombardment of solids | pl |
| dc.title.journal | Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms | pl |
| dc.title.volume | Proceedings of the 11th Computer Simulation of Radiation Effects in Solids (COSIRES) Conference Santa Fe, New Mexico, USA, July 24-29, 2012 | pl |
| dc.type | JournalArticle | pl |
| dspace.entity.type | Publication |
Affiliations
Wydział Fizyki, Astronomii i Informatyki Stosowanej
Postawa, Zbigniew
Paruch, Robert
No affiliation
Garrison, Barbara J.